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KLA / THERMA-WAVE OP-5340
    Description
    No description
    Configuration
    2LP+1Chamber
    OEM Model Description
    The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems. OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.
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    KLA / THERMA-WAVE

    OP-5340

    verified-listing-icon

    Verified

    CATEGORY

    Metrology
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    47033

    Wafer Sizes:

    12"/300mm

    Vintage:

    2001

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    KLA / THERMA-WAVE

    OP-5340

    verified-listing-icon

    Verified

    CATEGORY

    Metrology
    Last Verified: Over 60 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    47033

    Wafer Sizes:

    12"/300mm

    Vintage:

    2001

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    2LP+1Chamber
    OEM Model Description
    The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems. OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.
    Documents

    No documents

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