Description
The unit is fully functional and has PAC to prevent cracking.Configuration
Refurbished by TEL in 2018 TEL Certified Used Tool Base unit ONO process. Quartz for Process & Loading Fixture Maintenance Fixture US Safety S2-93 ONO Process Specific Option -Integrated Gas System For ONO -2 NH3 Gas Line -1 DCS Gas Line -1 N2O Gas Line w/ PAC Unit -6 N2 Gas Line Thermal ALPHA-8SE Processing -Normal I/O Configuration -25 Wafers/Cassette without Notch Alignment -21 Cassette Loading Automation -8 inch Wafer Handling Capability -Wafer Load Automation -Wafer Counter -Auto Tube Shutter -Boat Elevator Cassette and Wafer Handling Automation -Power Supply Unit, Control Unit: 3-ph 480VAC, 1-ph 208VAC -Main Controller (WAVES) -Temperature Controller (Model 560) -VMN-40-101 500-1000C Cabinets/Units/Controllers -Furnace Cabinet (I Type Deep Bay Layout)OEM Model Description
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.Documents
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TEL / TOKYO ELECTRON
ALPHA-8SE
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: 21 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
103893
Wafer Sizes:
8"/200mm
Vintage:
Unknown
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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TEL / TOKYO ELECTRON
ALPHA-8SE
CATEGORY
Furnaces / Diffusion
Last Verified: 21 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
103893
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
The unit is fully functional and has PAC to prevent cracking.Configuration
Refurbished by TEL in 2018 TEL Certified Used Tool Base unit ONO process. Quartz for Process & Loading Fixture Maintenance Fixture US Safety S2-93 ONO Process Specific Option -Integrated Gas System For ONO -2 NH3 Gas Line -1 DCS Gas Line -1 N2O Gas Line w/ PAC Unit -6 N2 Gas Line Thermal ALPHA-8SE Processing -Normal I/O Configuration -25 Wafers/Cassette without Notch Alignment -21 Cassette Loading Automation -8 inch Wafer Handling Capability -Wafer Load Automation -Wafer Counter -Auto Tube Shutter -Boat Elevator Cassette and Wafer Handling Automation -Power Supply Unit, Control Unit: 3-ph 480VAC, 1-ph 208VAC -Main Controller (WAVES) -Temperature Controller (Model 560) -VMN-40-101 500-1000C Cabinets/Units/Controllers -Furnace Cabinet (I Type Deep Bay Layout)OEM Model Description
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.Documents
No documents