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SUSS MicroTec / KARL SUSS MA6
    Description
    Wafer Size: up to 6"
    Configuration
    - Topside (TSA) Alignment - Suss Dual Video Microscope DVM6 - Objectives: 5X, 10X, 20X - UV400 Optics (for 365nm and 405nm exposure) - CIC 1200 UV Power Supply - Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling. - Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact - 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps) - Incorporated Newport Vibration Isolation Table (for Suss MA6) - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask Aligner
    OEM Model Description
    The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.
    Documents

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    SUSS MicroTec / KARL SUSS

    MA6

    verified-listing-icon

    Verified

    CATEGORY

    Mask Aligner
    Last Verified: Over 30 days ago
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    78088


    Wafer Sizes:

    6"/150mm


    Vintage:

    2001

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    Logistics Support
    Available
    Money Back Guarantee
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    Transaction Insured by Moov
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    Refurbishment Services
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    Similar Listings
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    SUSS MicroTec / KARL SUSS MA6
    SUSS MicroTec / KARL SUSSMA6Mask Aligner
    Vintage: 0Condition: Used
    Last VerifiedOver 30 days ago

    SUSS MicroTec / KARL SUSS

    MA6

    verified-listing-icon

    Verified

    CATEGORY

    Mask Aligner
    Last Verified: Over 30 days ago
    listing-photo-512478cf55224d8f89a86154421e8d3e-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2046/512478cf55224d8f89a86154421e8d3e/6721eb429ab2451191398df146d3bd80_14f9a52413344667936723b85bbdceb11201a_mw.jpeg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    78088


    Wafer Sizes:

    6"/150mm


    Vintage:

    2001


    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Wafer Size: up to 6"
    Configuration
    - Topside (TSA) Alignment - Suss Dual Video Microscope DVM6 - Objectives: 5X, 10X, 20X - UV400 Optics (for 365nm and 405nm exposure) - CIC 1200 UV Power Supply - Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling. - Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact - 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps) - Incorporated Newport Vibration Isolation Table (for Suss MA6) - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask Aligner
    OEM Model Description
    The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.
    Documents

    No documents

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    View All
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