Description
Wafer Size: up to 6"Configuration
- Topside (TSA) Alignment - Suss Dual Video Microscope DVM6 - Objectives: 5X, 10X, 20X - UV400 Optics (for 365nm and 405nm exposure) - CIC 1200 UV Power Supply - Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling. - Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact - 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps) - Incorporated Newport Vibration Isolation Table (for Suss MA6) - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEM Model Description
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.Documents
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SUSS MicroTec / KARL SUSS
MA6
Verified
CATEGORY
Mask Aligner
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
78088
Wafer Sizes:
6"/150mm
Vintage:
2001
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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View AllSUSS MicroTec / KARL SUSS
MA6
Verified
CATEGORY
Mask Aligner
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
78088
Wafer Sizes:
6"/150mm
Vintage:
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Wafer Size: up to 6"Configuration
- Topside (TSA) Alignment - Suss Dual Video Microscope DVM6 - Objectives: 5X, 10X, 20X - UV400 Optics (for 365nm and 405nm exposure) - CIC 1200 UV Power Supply - Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling. - Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact - 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps) - Incorporated Newport Vibration Isolation Table (for Suss MA6) - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEM Model Description
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.Documents
No documents